钨/类金刚石复合膜的摩擦磨损行为研究

doi:10.19784/j.cnki.issn1672-0172.2021.04.017

家电科技 ›› 2021, Vol. 0 ›› Issue (4): 86-90.doi: 10.19784/j.cnki.issn1672-0172.2021.04.017

钨/类金刚石复合膜的摩擦磨损行为研究

汪云海^1,2, 李星¹, 强克迪², 毛晶晶¹

1.航天科工武汉磁电有限责任公司特种材料检测试验中心湖北武汉 430000;
2.珠海格力电器股份有限公司工艺研究中心广东珠海 519000

出版日期:2021-08-01 发布日期:2021-08-09
作者简介:汪云海（1989-）,男,硕士/工程师。研究方向：金属材料表面改性。地址：湖北省武汉市东湖高新开发区华光大道5-2号。E-mail：499683663@qq.com。

The tribological behavior of W/Diamond-like carbon composite films

WANG Yunhai^1,2, LI Xing¹, QIANG Kedi², MAO Jingjing¹

1. China Aerospace Science & Industry Wuhan Magnetoelectric Co., Ltd. The Testing Center Of Special Material Wuhan 430000;
2. Gree Electric Appliances, Inc. Of Zhuhai, Craft Research Center Zhuhai 519000

Online:2021-08-01 Published:2021-08-09

摘要/Abstract

摘要： 采用复合磁控溅射法在高速钢HAP40表面制备了钨（W）/类金刚石（Diamond-like carbon,DLC）复合膜,通过调整工艺参数获得了5 μm厚的复合膜（W层：1.7 μm;W_XC_Y层：0.3 μm;DLC层：3 μm）,重点研究了W/DLC复合膜的结构组分、截面形貌和摩擦磨损行为。结果表明：W和W_XC_Y复合层的存在有利于降低DLC层的生长内应力,改善其界面结合情况;W/DLC复合膜的主要磨损形式为滑动磨损,表面基本没有粘附铝元素,但是会吸附空气中或润滑油中的氧;W/DLC复合膜中存在大量氢原子饱和σ悬键,使复合膜表面被钝化,进而获得低摩擦系数。

关键词: 磁控溅射, 类金刚石膜, 复合膜, 摩擦磨损, 表面钝化

Abstract: The composite films of W/Diamond like carbon (DLC) were prepared on the surface of high speed steel HAP40 by magnetron sputtering. A 5 μm thick composite films (W layer: 1.7 μm; W_XC_Y layer: 0.3 μm; DLC layer: 3 μm) was obtained by adjusting the process parameters. The structure, cross-sectional morphology and friction and wear properties of W/DLC composite films are mainly studied. The results show that the existence of W and W_XC_Y composite layer is benefit to reduce the growth stress of DLC layer and improve its interface bonding. The main wear form of W/DLC composite films is sliding wear which does not adhere aluminum powder, but it would absorb oxygen atom from the air or lubricating oil. There are a lot of hydrogen saturated σ-dangling bonds in W/DLC composite films, which passivates the surface of the composite film and leads to low friction coefficient.

Key words: Magnetron sputtering, Diamond-like carbon film, Composite films, Friction and wear, Surface passivation

中图分类号:

TB332

汪云海, 李星, 强克迪, 毛晶晶. 钨/类金刚石复合膜的摩擦磨损行为研究[J]. 家电科技, 2021, 0(4): 86-90.

WANG Yunhai, LI Xing, QIANG Kedi, MAO Jingjing. The tribological behavior of W/Diamond-like carbon composite films[J]. Journal of Appliance Science & Technology, 2021, 0(4): 86-90.

参考文献

[1] Rrdemir A, Donnet C.Tribology of diamond-like carbon films: recent progress and future prospects[J]. J Physs D: Appl Phys, 2006, 39(18): R311-R327.
[2] 杨玉卫, 杨坚, 古宏伟, 等. 类金刚石薄膜的性能、制备及其应用[J]. 硅酸盐通报, 2008, 27(01): 119-126.
[3] 陈明文. 含氢类金刚石薄膜的生长及表征[J]. 光谱实验室, 2008, 25(03): 462-464.
[4] 李振军, 徐洮, 李红轩. 类金刚石薄膜的摩擦学特性及磨损机制研究进展[J]. 材料科学与工程学报, 2004, 22(05): 774-777.
[5] Erdemir A.Genesis of superlow friction and wear in diamondlike carbon films[J]. Tribology International, 2004, 37: 1005-1012.
[6] Bendavid A, Martin P J, Randeniya L, et al.The Properties of Fluorine Containing Diamond-like Carbon Films Prepared by Plasma-enhanced Chemical Vapour Deposition[J]. Diamond and Related Materials, 2009, 18: 66-71.
[7] 陈青云, 施凯敏, 苏敏华, 等. 类金刚石膜研究进展[J]. 2017, 45(03): 119-128.
[8] 聂君兰, 谷坤明, 汤皎宁, 等. 过渡层类型对类金刚石薄膜性能的影响[J]. 润滑与密封, 2008, 33(02): 87-90.
[9] Chun-Chin Chen, Franklin Chau-Nan Hong. Interfacial studies for improving the adhesion of Diamond-like carbon films on Steel[J]. Applied Surface Science. 2005, 243(1-4): 296-303.
[10] Zhi-Jie Liu, Zi-Kui Liu, Charles McNerny, et al. Investigatioons of the bonding layer in commercial CVD coated cemented carbide inserts[J]. Surface and Coatings Technology, 2004, 198(01): 161-164.
[11] Y. Liu, X. Yu, L. ma, et al. Influence of chromium buffer layer on Cr/ta-C composite films[J]. Surface Engineering, 2013, 29(04): 276-280.
[12] Kwang-Ryeol. Lee, Kwang. Yong. Eun, Inyoung. Kim, et al.Design of W buffer layer for adhesion improvement of DLC films on tool steels[J]. Thin Solid Films, 2000(377): 261-268.
[13] Ritwik. Kumar. Roy, Sk. Faruque. Ahmed, Jin. Woo. Yi, et al.Improvement of adhesion of DLC coating on nitinol substrate by hybrid ion beam deposition technique[J]. Vacuum, 2009, 83(09): 1179-1183.

钨/类金刚石复合膜的摩擦磨损行为研究

The tribological behavior of W/Diamond-like carbon composite films

PDF

可视化

摘要/Abstract

引用本文

使用本文

参考文献

相关文章 0

Metrics

本文评价

推荐阅读 0